概要
● 6自由度振动应答
● Passive Isolator中10 Hz 以下低频率不会发生共振现象
● Feedback 控制 ,使用Feedforward 来控制Stage 等的移动荷载将晃动值最小化● 精密度极高
● 将UNIT type模型高度标准化为 191 mm
特征
构成
● MRZ Actuator 4 units
● Controller & Amplifier 1 set
● Air Pressure & Regulator 1 set
● Electric Cables 1 set
● Air Tubes 1 set
● User’ s Manual 1 pcs
式样
Model | MAPS-008 | MAPS-016 | MAPS-033 | MAPS-065 | MAPS-013 | MAPS-240 |
Paylode(kN) (kgf/4 unit) | 4 ~ 8 (400 ~ 800) | 4 ~ 8 (400 ~ 800) | 16 ~ 33 (1600 ~ 3400) | 33 ~ 65 (3400 ~ 6600) | 33 ~ 65 (3400 ~ 6600) | 130 ~ 240 (13300 ~ 24500) |
Dimension (mm) | 235X235X130 | 296X296X140 | 350X350X150 | 350X350X150 | 600X480X190 | 710X600X190 |
Weight (kg/Unit) | 13 kg | 42 kg | 63 kg | 110 kg | 1802 kg | 230 kg |
Air Pressure (MPa) | 0.6 MPa ~ 0.8 MPa (Dry Clean Air) |
Air Consumption | 45 ~ 65 l/min (Standard) | 120 ~ 170 l/min (Standard) |
120 l/min (Max) | 300 l/min (Max) |
Power Supply Voltage | 100 V~240 V (AC,单向, 50/60 Hz) |
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Power Supply Voltage | ~0.050 mm |
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6Degrees of Freedom | 6 |
产品外形图
